21 Jan UV F-theta lens for electronics production
Excelitas Technologies presents a new F-theta lens with reduced outgassing behavior. According to the manufacturer, the quartz glass lens from the Linos UV F-Theta-Ronar series is particularly suitable for semiconductor production and for UV laser processing with high power and short pulses in general. It is equipped with a high-end broadband coating and optimized for the wavelength range from 340 nm to 360 nm. According to Excelitas, the high-quality optical design minimizes back reflections and offers uniform spot sizes across the entire scan field. With a laser exit aperture of 15 mm, the minimum spot size is 11 µm. The F-Theta lens is designed for a focal length of 252 mm. It can also be combined with the low-emission UV beam expander from Excelitas. According to the manufacturer, the materials for the housing and dust cap have also been selected for their low outgassing properties. The F-Theta lens can be integrated into industrial laser applications via its standard M85x1 thread. Target applications include wafer processing, display manufacturing and solar cell production.
Further information from the manufacturer
Excelitas Technologies will exhibit the new model at SPIE Photonics West 2025
Booth 641
Source and image: www.excelitas.com
